Highly Efficient Color Separation and Focusing in the Sub-micron CMOS Image Sensor
Seokho Yun, Sookyoung Roh, Sangyun Lee, Hong‐Kyu Park, Minwoo Lim, Sungmo Ahn, Hyuck Choo
Abstract
We report nanoscale metaphotonic color-routing (MPCR) structure that can significantly improve the low-light performance of a sub-micron CMOS image sensor. Fabricated on the Samsung's commercial <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$0.8\mu \mathrm{m}$</tex> -pixel sensor, MPCR structures separate the incident light energy into appropriate color pixels at high efficiency, yielding increased quantum efficiency up to +20%. Our experimental demonstration confirms a luminance SNR improvement of +1.22 dB under low light condition of 5 lux, accompanied with a comparably low color reproduction error and great angular tolerant response.