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The effect of oxygen introduced by WO3 on the structure and tribological performance of W-S-O sputtered films

Zhaowang Li, Desheng Wang, Qinglin Ye, Jun He, Jiayi Sun, Lijun Weng, Ming Hu, Xiaoming Gao

2024Tribology International11 citationsDOI

Topics & Concepts

TribologyMaterials scienceOxygenNanotechnologyChemical engineeringComposite materialChemistryEngineeringOrganic chemistryMetal and Thin Film MechanicsLubricants and Their AdditivesDiamond and Carbon-based Materials Research
The effect of oxygen introduced by WO3 on the structure and tribological performance of W-S-O sputtered films | Litcius