AZO work function enhanced by oxygen plasma immersion ion implantation
Zebin Li, Lianbi Li, Guoqing Zhang, Lixun Song, Zheyan Tu, Chao Han
Topics & Concepts
X-ray photoelectron spectroscopyPlasma-immersion ion implantationKelvin probe force microscopeWork functionOxygenAnalytical Chemistry (journal)StoichiometrySurface modificationDopingIonMaterials scienceAtomic force microscopyThin filmChemistryIon implantationNanotechnologyChemical engineeringOptoelectronicsPhysical chemistryChromatographyLayer (electronics)EngineeringOrganic chemistryZnO doping and propertiesMetal and Thin Film MechanicsSemiconductor materials and devices