Enhanced low-temperature response of Ga2O3-based oxygen sensor by modulating the surficial micro-nano structures
Jingjing Zhao, Binhao Qin, Lihua Liu, Chuangming Liang, Yupeng Zhang, Weijia Yang, Haiyan Wang
Topics & Concepts
OxygenMaterials scienceNano-AdsorptionNanorodDesorptionOperating temperatureSputter depositionNanowireNanotechnologyNanoparticleAnalytical Chemistry (journal)SputteringThin filmChemical engineeringOptoelectronicsChemistryComposite materialPhysical chemistryEnvironmental chemistryElectrical engineeringOrganic chemistryEngineeringGa2O3 and related materialsGas Sensing Nanomaterials and SensorsZnO doping and properties