Fabrication of Cr-Si-N coatings using a hybrid high-power impulse and radio-frequency magnetron co-sputtering: The role of Si incorporation and duty cycle
Wahyu Diyatmika, Chih‐Yuan Cheng, Jyh‐Wei Lee
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceDuty cycleSputter depositionThin filmMicrostructureGrain sizeCavity magnetronAmorphous solidAnalytical Chemistry (journal)Composite materialSputteringOptoelectronicsMetallurgyNanotechnologyCrystallographyElectrical engineeringVoltageEngineeringChemistryChromatographyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchAdvanced ceramic materials synthesis