Numerical and experimental investigation on ductile deformation and subsurface defects of monocrystalline silicon during nano-scratching
Bing Liu, Zongwei Xu, Cheng Chen, Rui Li, Xiang Gao, Lin Liang
Topics & Concepts
ScratchingMonocrystalline siliconMaterials scienceNanoindentationNano-BrittlenessDiamondDeformation (meteorology)SiliconComposite materialIndentationScratchMolecular dynamicsDiamond toolDiamond turningMetallurgyChemistryComputational chemistryAdvanced Surface Polishing TechniquesMetal and Thin Film MechanicsDiamond and Carbon-based Materials Research