A Copula network deconvolution-based direct correlation disentangling framework for explainable fault detection in semiconductor wafer fabrication
Hongwei Xu, Wei Qin, Jinhua Hu, Yan‐Ning Sun, Youlong Lv, Jie Zhang
Topics & Concepts
Copula (linguistics)Fault detection and isolationElectronic engineeringNonlinear systemWaferComputer scienceSemiconductor device fabricationEngineeringAlgorithmMathematicsArtificial intelligencePhysicsElectrical engineeringQuantum mechanicsActuatorEconometricsIndustrial Vision Systems and Defect DetectionFault Detection and Control SystemsSpectroscopy and Chemometric Analyses