Atomic Layer Deposition of Two-Dimensional Layered Materials: Processes, Growth Mechanisms, and Characteristics
Jiyu Cai, Xiaoxiao Han, Xin Wang, Xiangbo Meng
Topics & Concepts
Atomic layer depositionControllabilityNanotechnologyAtomic unitsMaterials scienceGrapheneNanoscopic scaleLayer (electronics)Deposition (geology)Computer scienceEngineering physicsPhysicsGeologyMathematicsApplied mathematicsPaleontologyQuantum mechanicsSediment2D Materials and ApplicationsGraphene research and applicationsElectronic and Structural Properties of Oxides