Auxiliary capacitor to enhance oscillation in circuit and reduce current onset delay in HiPIMS discharge: Theory, experiment and simulation
Mingyue Han, Yang Luo, Hua Li, Liuhe Li, Ye Xu, Sida Luo, Peipei Zhang, Hao Xu, Changyun Xu
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceVoltageCapacitorOscillation (cell signaling)PlasmaBreakdown voltageImpulse (physics)Electrical engineeringAtomic physicsMechanicsSputteringPhysicsSputter depositionChemistryNanotechnologyThin filmEngineeringBiochemistryQuantum mechanicsMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchPlasma Diagnostics and Applications