Doping strategy on properties and chemical mechanical polishing performance of CeO2 Abrasives: A DFT assisted experimental study
Jiahui Ma, Ning Xu, Jinrong Hu, Yuxin Luo, Yu Lin, Yongping Pu
Topics & Concepts
DopingMaterials scienceX-ray photoelectron spectroscopySubstrate (aquarium)AbrasivePolishingChemical-mechanical planarizationChemical engineeringDensity functional theoryNanotechnologyMetallurgyOptoelectronicsChemistryComputational chemistryOceanographyGeologyEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced materials and composites