Microstructure of titanium coatings controlled by pulse sequence in multipulse HiPIMS
Pavel Souček, Jaroslav Hnilica, Peter Klein, Matej Fekete, Petr Vašina
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceSputter depositionMicrostructureTitaniumCavity magnetronCoatingSurface roughnessPlasmaSputteringOptoelectronicsMetallurgyThin filmComposite materialNanotechnologyPhysicsQuantum mechanicsMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchIon-surface interactions and analysis