Electroplating of Cu/Sn bumps with ultrafine pitch and high uniformity for micro-LED interconnection
Canlin Luo, Chang Lin, Jinyu Ye, Huangjie Zeng, Xiongtu Zhou, Chaoxing Wu, Yongai Zhang, Jie Sun, Tailiang Guo, Qun Yan
Topics & Concepts
InterconnectionElectroplatingMaterials scienceMetallurgyOptoelectronicsEngineering physicsNanotechnologyComputer scienceEngineeringTelecommunicationsLayer (electronics)Electronic Packaging and Soldering TechnologiesElectrodeposition and Electroless Coatings3D IC and TSV technologies