In-situ low-temperature synthesis of PS-ZrO2 hybrid films and their characterization for high-k gate dielectric application
Diana Sánchez-Ahumada, Libia Judith Verastica-Ward, Martín Orozco, Diana Vargas-Hernández, Andrés Castro-Beltrán, R. Ramı́rez-Bon, Clemente G. Alvarado-Beltrán
Topics & Concepts
Materials scienceDielectricHybrid materialX-ray photoelectron spectroscopyZirconiumChemical engineeringMethacrylatePolystyreneThin filmFourier transform infrared spectroscopyPolymerizationHigh-κ dielectricDip-coatingPolymer chemistryCoatingComposite materialPolymerNanotechnologyOptoelectronicsMetallurgyEngineeringSemiconductor materials and devicesCopper Interconnects and ReliabilityFerroelectric and Negative Capacitance Devices