Tuning size and coverage of Pd nanoparticles using atomic layer deposition
Ji‐Yu Feng, Ranjith K. Ramachandran, Eduardo Solano, Matthias M. Minjauw, Michiel Van Daele, A. Vantomme, Daniel Hermida‐Merino, Alessandro Coati, Hilde Poelman, Christophe Detavernier, Jolien Dendooven
Topics & Concepts
NucleationNanoparticleGrazing-incidence small-angle scatteringCoalescence (physics)PalladiumMaterials scienceDeposition (geology)Scanning electron microscopeChemical engineeringPlasmaLayer (electronics)Analytical Chemistry (journal)NanotechnologyScatteringChemistryChromatographyOrganic chemistryOpticsComposite materialBiologyCatalysisPaleontologyEngineeringAstrobiologyPhysicsSmall-angle neutron scatteringSedimentNeutron scatteringQuantum mechanicsSemiconductor materials and devicesCatalytic Processes in Materials ScienceElectronic and Structural Properties of Oxides