Internal resonance in a MEMS levitation force resonator
Mohammadreza Zamanzadeh, Hil G. E. Meijer, Hassen M. Ouakad
Topics & Concepts
MicrobeamLevitationVibrationResonatorMicroelectromechanical systemsActuatorHarmonic balanceCantileverAcousticsPhysicsVoltageHarmonicBifurcationParametric oscillatorResonance (particle physics)Nonlinear systemMechanicsEngineeringElectrical engineeringOpticsStructural engineeringOptoelectronicsAtomic physicsMagnetQuantum mechanicsAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAcoustic Wave Resonator Technologies