Surface functionalization on nanoparticles via atomic layer deposition
Kun Cao, Jiaming Cai, Bin Shan, Rong Chen
Topics & Concepts
Atomic layer depositionSurface modificationNanotechnologyPassivationConformal coatingMaterials scienceCoatingNanoparticleNanoporeNanolithographySemiconductorThin filmLayer (electronics)Chemical engineeringFabricationOptoelectronicsEngineeringMedicineAlternative medicinePathologySemiconductor materials and devicesElectronic and Structural Properties of OxidesCatalytic Processes in Materials Science