Abrasive polishing load effect on surface roughness and material removal rate of Al2O3, ZTA and SiC
Nathan Fantecelle Strey, Chérlio Scandian
Topics & Concepts
Materials sciencePolishingAbrasiveSurface roughnessComposite materialSilicon carbideCeramicSurface finishSlurryTribologyChemical-mechanical planarizationDiamondMetallurgyAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced machining processes and optimization