Litcius/Paper detail

Microstructures and properties of Mo2N+MoS2 coatings deposited by direct current magnetron sputtering

Li Sun, Ting Ruan, Zhigang Yuan, Q.F. Fang, Wenbang Gong, Xiao Wu, Shunqi Mei

2020Vacuum11 citationsDOI

Topics & Concepts

MicrostructureMaterials scienceNanoindentationComposite numberSputter depositionCoatingComposite materialLayer (electronics)SputteringCavity magnetronScanning electron microscopeDiffractionPhase (matter)MetallurgyThin filmNanotechnologyOpticsPhysicsChemistryOrganic chemistryMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchTribology and Wear Analysis
Microstructures and properties of Mo2N+MoS2 coatings deposited by direct current magnetron sputtering | Litcius