Fundamental investigation of subsurface damage on the quality factor of hemispherical fused silica shell resonator
Jianning Chu, Xin Liu, Changlin Liu, Jianguo Zhang, Junfeng Xiao, Xuefang Wang, Xiao Chen, Jianfeng Xu
Topics & Concepts
Materials scienceResonatorIsotropic etchingEtching (microfabrication)Q factorOpticsLaserRing laser gyroscopeOptoelectronicsComposite materialLayer (electronics)PhysicsAdvanced MEMS and NEMS TechnologiesAcoustic Wave Resonator TechnologiesGeophysics and Sensor Technology