Density functional theory study on the modification of silicon nitride surface by fluorine-containing molecules
Tanzia Chowdhury, Romel Hidayat, Hye-Lee Kim, Tirta Rona Mayangsari, Seongjae Cho, Sangjoon Park, Jongwan Jung, Won‐Jun Lee
Topics & Concepts
FluorineSilicon nitrideMoleculeChemistryDissociation (chemistry)NitrideDensity functional theoryExothermic reactionSiliconInorganic chemistrySilicon oxideOxidePhysical chemistryComputational chemistryOrganic chemistryLayer (electronics)Ga2O3 and related materialsPlasma Diagnostics and ApplicationsZnO doping and properties