Controlled growth of nanocrystalline aluminum nitride films for full color range
Xunwang Shi, Xiuhan Yu, Caiwen Nie, Fengji Li, Sam Zhang
Topics & Concepts
Materials scienceNanocrystalline materialColorimeterChromaticityScanning electron microscopeWaferThin filmSputter depositionOpticsOptoelectronicsX-ray photoelectron spectroscopyDiffractionNitrideAnalytical Chemistry (journal)SputteringNanotechnologyChemical engineeringLayer (electronics)Composite materialChemistryChromatographyEngineeringPhysicsOptical Coatings and GratingsGaN-based semiconductor devices and materialsZnO doping and properties