Litcius/Paper detail

Theoretical investigation of multipulse femtosecond laser processing on silicon carbide: ablation, shielding effect, and recast formation

Zhaoxuan Yan, Xuesong Mei, Wenjun Wang, Zhengjie Fan, Aifei Pan, Qingzhen Zheng

2024Optics & Laser Technology18 citationsDOI

Topics & Concepts

Silicon carbideAblationMaterials scienceFemtosecondElectromagnetic shieldingLaser ablationLaserOptoelectronicsSiliconOpticsComposite materialPhysicsMedicineInternal medicineLaser Material Processing TechniquesDiamond and Carbon-based Materials ResearchLaser-induced spectroscopy and plasma