Harmonic excitation response performance and active regulation of the high-frequency piezoelectric ultrasonic transducer used in the thermosonic bonding for microelectronics
Hongjie Zhang, Chunyang Zhao, Xiangfei Ning, Jiawei Huang, Jichang Zhang
Topics & Concepts
Ultrasonic sensorTransducerMicroelectronicsAcousticsHarmonicFrequency responsePiezoelectricityOvershoot (microwave communication)Ultrasonic testingMaterials scienceSettling timeElectronic engineeringEngineeringElectrical engineeringOptoelectronicsStep responsePhysicsControl engineeringElectronic Packaging and Soldering TechnologiesAdvanced MEMS and NEMS TechnologiesPiezoelectric Actuators and Control