Enhancing HVAC energy efficiency modeling in semiconductor manufacturing facilities using tree-structured parzen estimator-optimized deep learning
Hsiao-Ping Ni, Chi‐Yun Liu, Yanlin Li, Wai Oswald Chong, Jui‐Sheng Chou
Topics & Concepts
HVACEstimatorSemiconductor device fabricationEnergy (signal processing)Efficient energy useComputer scienceEngineeringAutomotive engineeringEnvironmental scienceArtificial intelligenceReliability engineeringStatisticsMathematicsMechanical engineeringElectrical engineeringAir conditioningWaferBuilding Energy and Comfort OptimizationEnergy Load and Power ForecastingEnergy Efficiency and Management