Design and sensitivity analysis of capacitive MEMS pressure sensor for blood pressure measurement
K. Srinivasa Rao, W. Samyuktha, D. Vazad Vardhan, B. Girish Naidu, P. Ashok Kumar, K. Girija Sravani, Koushik Guha
Topics & Concepts
Capacitive sensingCapacitanceMicroelectromechanical systemsDeflection (physics)DielectricMultiphysicsPressure sensorMaterials scienceDiaphragm (acoustics)ElectrodeSensitivity (control systems)Electrical engineeringElectronic engineeringOptoelectronicsPhysicsEngineeringStructural engineeringMechanical engineeringFinite element methodOpticsQuantum mechanicsLoudspeakerAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAdvanced Sensor and Energy Harvesting Materials