Effect of annealing on the properties of plasma-enhanced atomic layer deposition grown HfO2 coatings for ultraviolet laser applications
Zesheng Lin, Meiping Zhu, Chen Song, Tianbao Liu, Chaoyi Yin, Tingting Zeng, Jianda Shao
Topics & Concepts
Annealing (glass)Materials scienceImpurityCoatingAtomic layer depositionOxideStoichiometryOxygenAnalytical Chemistry (journal)Reducing atmosphereMonolayerThin filmChemical engineeringNanotechnologyChemistryMetallurgyPhysical chemistryOrganic chemistryChromatographyEngineeringSemiconductor materials and devicesElectronic and Structural Properties of OxidesDiamond and Carbon-based Materials Research