On-chip short-wave infrared multispectral detector based on integrated Fabry–Perot microcavities array
Zhiyi Xuan, Qingquan Liu, Zhuangzhuang Cui, Songlei Huang, Bo Yang, Chenlu Li, Shaowei Wang, Wei Lü
Abstract
We demonstrate an ultra-compact short-wave infrared (SWIR) multispectral detector chip by monolithically integrating the narrowband Fabry-Perot microcavities array with the InGaAs detector focal plane array. A 16-channel SWIR multispectral detector has been fabricated for demonstration. Sixteen different narrowband response spectra are acquired on a 64 64 pixels detector chip by four times combinatorial etching processes. The peak of the response spectra varies from 1450 to 1666 nm with full width at half-maximum of 24 nm on average. The size of the SWIR multispectral detection system is remarkably reduced to a 2 mm 2 detector chip.
Topics & Concepts
Multispectral imageDetectorOpticsNarrowbandChipDot pitchOptoelectronicsFabry–Pérot interferometerPixelInfrared detectorMaterials scienceInfraredPhotodetectorCardinal pointPhysicsWavelengthRemote sensingTelecommunicationsComputer scienceGeologyPhotonic and Optical DevicesGas Sensing Nanomaterials and SensorsPlasmonic and Surface Plasmon Research