Hyperdoping-regulated room-temperature NO2 gas sensing performances of black silicon based on lateral photovoltaic effect
Wenjing Wang, Hua Li, Xiaolong Liu, Shengxiang Ma, Yang Zhao, Binbin Dong, Yuan Li, Xi‐Jing Ning, Li Zhao, Jun Zhuang, Jun Zhuang
Topics & Concepts
Black siliconPhotocurrentSiliconMaterials sciencePhotovoltaic systemRelative humidityNitrogenDopingOptoelectronicsFemtosecondEtching (microfabrication)Analytical Chemistry (journal)ChemistryOpticsLaserNanotechnologyEnvironmental chemistryMeteorologyPhysicsEcologyBiologyLayer (electronics)Organic chemistrySilicon Nanostructures and PhotoluminescenceNanowire Synthesis and ApplicationsGas Sensing Nanomaterials and Sensors