Using intelligent technology and real-time feedback algorithm to improve manufacturing process in IoT semiconductor industry
Bin Li, Ruey‐Shun Chen, C.-Y. Liu
Topics & Concepts
Semiconductor device fabricationComputer scienceFlexibility (engineering)Wafer fabricationWaferStatistical process controlComputer-integrated manufacturingProcess (computing)Manufacturing engineeringReworkProcess controlProcess engineeringEmbedded systemEngineeringOperating systemMathematicsElectrical engineeringStatisticsIndustrial Vision Systems and Defect DetectionManufacturing Process and OptimizationScheduling and Optimization Algorithms