Atomic Understanding of the Plastic Deformation Mechanism of 4H-SiC Under Different Grain Depth-of-cut During Nano-Grinding
Haoxiang Wang, Shang Gao, Xiaoguang Guo, Yulong Ding, Renke Kang
Topics & Concepts
Materials scienceGrindingDeformation (meteorology)Monocrystalline siliconDeformation mechanismAbrasiveComposite materialNucleationDislocationAmorphous solidSurface roughnessSilicon carbideNano-SuperplasticityMachiningMetallurgySiliconMicrostructureCrystallographyOrganic chemistryChemistryAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchMetal and Thin Film Mechanics