AC conductivity and dielectric parameters studies in multilayer TiO2/ZnO thin films produced via ALD technique
S.S. Fouad, Bence Parditka, H.E. Atyia, E. Baradács, A.E. Bekheet, Zoltán Erdélyi
Topics & Concepts
DielectricMaterials scienceConductivityThin filmAtomic layer depositionSubstrate (aquarium)Dielectric lossAtmospheric temperature rangeElectrical resistivity and conductivityBilayerOptoelectronicsNanotechnologyElectrical engineeringThermodynamicsChemistryGeologyMembraneOceanographyBiochemistryPhysical chemistryEngineeringPhysicsZnO doping and propertiesSemiconductor materials and devicesAcoustic Wave Resonator Technologies