The influence of pressure and magnetic field on the deposition of epitaxial TiBx thin films from DC magnetron sputtering
Nils Nedfors, Daniel Primetzhofer, Igor Zhirkov, Justinas Pališaitis, Per O. Å. Persson, J. E. Greene, I. Petrov, Johanna Rosén
Topics & Concepts
Sputter depositionMaterials scienceEpitaxyThin filmCavity magnetronSubstrate (aquarium)SputteringAnalytical Chemistry (journal)ChemistryNanotechnologyGeologyOceanographyLayer (electronics)ChromatographyMetal and Thin Film MechanicsSemiconductor materials and devicesDiamond and Carbon-based Materials Research