Polarity control of sputter-deposited AlN with high-temperature face-to-face annealing
Kanako Shojiki, Kenjiro Uesugi, Shiyu Xiao, Hideto Miyake
Topics & Concepts
Materials scienceAnnealing (glass)Polarity (international relations)HeterojunctionSputteringEpitaxyOptoelectronicsNitrideSemiconductorLayer (electronics)NanotechnologyThin filmComposite materialChemistryCellBiochemistryGaN-based semiconductor devices and materialsMetal and Thin Film MechanicsAcoustic Wave Resonator Technologies