Dispersion stabilization of carbonyl iron particles and its applications in chemical mechanical planarization

Yen-Cheng Fang, Chih‐Huang Lai, Chia‐Chen Li

2023Colloids and Surfaces A Physicochemical and Engineering Aspects12 citationsDOI

Topics & Concepts

Chemical-mechanical planarizationMagnetorheological fluidDispersantZeta potentialMaterials scienceDispersion (optics)AdsorptionSlurryDispersion stabilityPolyacrylic acidPolishingChemical engineeringSurface roughnessAqueous solutionCoatingCarbonyl ironParticle (ecology)Surface chargeComposite materialNanotechnologyNanoparticleChemistryMagnetic fieldPhysical chemistryOpticsPolymerGeologyEngineeringPhysicsQuantum mechanicsOceanographyAdvanced Surface Polishing TechniquesForce Microscopy Techniques and ApplicationsDiamond and Carbon-based Materials Research