High resolution patterning of PbS quantum dots/graphene photodetectors with high responsivity <i>via</i> photolithography with a top graphene layer to protect surface ligands

Abstract

. We have also fabricated thirty-six PbS CQDs/SLG photodetectors on a single chip to establish micron size photodetectors. This process offers an approach to pattern QDs with conventional UV lithography and dry etching semiconductor technology to facilitate their integration into current semiconductor commercial technology.

Topics & Concepts