Intrasheath electron dynamics in low pressure capacitively coupled plasmas
Máté Vass, Aranka Derzsi, Julian Schulze, Zoltán Donkó
Abstract
Abstract We present a detailed analysis of electron trajectories within the sheath regions of capacitively coupled plasmas excited by radio-frequency voltage waveforms at low pressures. Complex features inside the sheaths are identified in several physical quantities, which are sculptured by the trajectories of bouncing energetic electrons (predominantly ion induced secondary electrons) under the influence of the spatio-temporally varying electric field. Based on a systematic parameter variation the generation of the various features as a function of surface processes is explained and the trajectories of electrons of different origin are identified.
Topics & Concepts
ElectronAtomic physicsPlasmaIonElectric fieldExcited stateWaveformCapacitively coupled plasmaSecondary electronsPhysicsComputational physicsVoltageInductively coupled plasmaQuantum mechanicsPlasma Diagnostics and ApplicationsDust and Plasma Wave PhenomenaAtomic and Molecular Physics