Ultra-high sensitive micro-chemo-mechanical hydrogen sensor integrated by palladium-based driver and high-performance piezoresistor
Hongfang Li, Yahui Li, Kai Wang, Liyan Lai, Xiaoxue Xu, Bin Sun, Zhuoqing Yang, Guifu Ding
Topics & Concepts
PolyimideMaterials sciencePalladiumHydrogen sensorHydrogenResistive touchscreenNanowireCantileverMicroelectromechanical systemsNanotechnologyElectrical resistance and conductanceOptoelectronicsComposite numberComposite materialLayer (electronics)ChemistryComputer scienceBiochemistryCatalysisOrganic chemistryComputer visionGas Sensing Nanomaterials and SensorsAdvanced Chemical Sensor TechnologiesAnalytical Chemistry and Sensors