Sputtered titanium nitride films as pseudocapacitive electrode for on chip micro-supercapacitors
Jing Shi, Bailing Jiang, Cong Li, Zheng Liu, Fangyuan Yan
Topics & Concepts
Materials scienceTitanium nitrideElectrodeThin filmTinSputteringTitaniumSputter depositionSupercapacitorCapacitanceNitrideNanotechnologyOptoelectronicsLayer (electronics)Composite materialMetallurgyChemistryPhysical chemistrySupercapacitor Materials and FabricationMXene and MAX Phase MaterialsElectrospun Nanofibers in Biomedical Applications