Photocatalytic assisted chemical mechanical polishing for silicon carbide using developed ceria coated diamond core-shell abrasives
Xiaoxiao Zhu, Yuziyu Gui, Hao Fu, Juxuan Ding, Zhangchao Mo, Xuesong Jiang, Jifei Sun, Boyuan Ban, Ling Wang, Jian Chen
Topics & Concepts
Materials scienceSilicon carbidePolishingDiamondPhotocatalysisCore (optical fiber)CarbideChemical-mechanical planarizationShell (structure)SiliconMetallurgyComposite materialChemical engineeringCatalysisChemistryEngineeringBiochemistryAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced machining processes and optimization