A novel direct drive electromagnetic XY nanopositioning stage
Zhiwei Zhu, Li Chen, Suet To
Topics & Concepts
ActuatorFinite element methodLissajous curvePID controllerControl theory (sociology)Controller (irrigation)TrajectoryEngineeringComputer scienceElectronic engineeringPhysicsControl engineeringElectrical engineeringControl (management)Structural engineeringOpticsArtificial intelligenceBiologyAgronomyAstronomyTemperature controlPiezoelectric Actuators and ControlForce Microscopy Techniques and ApplicationsMetal and Thin Film Mechanics