Effect of HF and NaOH etching on the composition and structure of SiOC ceramics
Kedong Xia, Chuang‐Chuang Li, Siyu Zhao, Yunling Li, Lingyao Duan, Xiao Liu
Topics & Concepts
Materials scienceEtching (microfabrication)Chemical engineeringPyrolysisMesoporous materialCeramicSpecific surface areaMicrostructureCarbon fibersAmorphous solidIsotropic etchingTetramethylammonium hydroxideReactive-ion etchingComposite materialNanotechnologyOrganic chemistryCatalysisChemistryLayer (electronics)EngineeringComposite numberAdvanced ceramic materials synthesisMXene and MAX Phase MaterialsSemiconductor materials and devices