Microstructure, mechanical and tribological properties of Hf-Mo-Si-N films with different Si contents
Zhaoli Liu, Hang Li, Jianliang Li, Jiewen Huang, Jian Kong, Qiujie Wu, Dangsheng Xiong
Topics & Concepts
Materials scienceMicrostructureNanocompositeAmorphous solidTribologyX-ray photoelectron spectroscopyPhase (matter)Fracture toughnessSputter depositionComposite materialSputteringThin filmChemical engineeringNanotechnologyCrystallographyOrganic chemistryEngineeringChemistryMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchAdvanced materials and composites