An unknown wafer surface defect detection approach based on Incremental Learning for reliability analysis
Zeyun Zhao, Jia Wang, Qian Tao, Andong Li, Yiyang Chen
Topics & Concepts
WaferLeverage (statistics)Convolutional neural networkComputer scienceArtificial intelligenceReliability (semiconductor)CategorizationDeep learningReduction (mathematics)DetectorMachine learningPattern recognition (psychology)Reliability engineeringData miningEngineeringMathematicsElectrical engineeringPower (physics)TelecommunicationsPhysicsGeometryQuantum mechanicsIndustrial Vision Systems and Defect DetectionIntegrated Circuits and Semiconductor Failure AnalysisNon-Destructive Testing Techniques