Effect of water film on the nano-scratching process of 4H-SiC under the constant load
Yuqi Zhou, Yuhua Huang, Jinming Li, Fulong Zhu
Topics & Concepts
ScratchingMaterials scienceChemical-mechanical planarizationTribologyLubricationNano-Composite materialFriction coefficientMolecular dynamicsPolishingComputational chemistryChemistryAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchMetal and Thin Film Mechanics