Study on Lapping Paste of 6H–SiC Single-Crystal Substrate in Tribochemical Mechanical Lapping

Jianxiu Su, Rui Xu, Wang Yipu, Jiejing Li, Liu Haixu

2020Journal of The Institution of Engineers (India) Series E10 citationsDOI

Topics & Concepts

LappingAbrasiveMaterials scienceSurface roughnessSubstrate (aquarium)Crystal (programming language)Sodium hydroxidePotassium permanganatePotassium hydroxideComposite materialChemical engineeringMetallurgyChemistryInorganic chemistryProgramming languageGeologyEngineeringComputer scienceOceanographyAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationForce Microscopy Techniques and Applications