Pt thin-film resistance temperature detector on flexible Hastelloy tapes
Lei Shao, Xiaohui Zhao, Shipeng Gu, Yaping Ma, Yang Liu, Xinwu Deng, Hongchuan Jiang, Wanli Zhang
Topics & Concepts
Materials scienceOptoelectronicsComposite materialThin filmAnnealing (glass)CeramicSputteringLayer (electronics)Sputter depositionResistance thermometerSubstrate (aquarium)Temperature measurementNanotechnologyQuantum mechanicsGeologyPhysicsOceanographyAdvanced Sensor Technologies ResearchScientific Measurement and Uncertainty EvaluationElectrical and Thermal Properties of Materials