Research on material removal mechanism and radial cracks during scribing single crystal gallium nitride
Qianqing Jiang, Lei Zhang, Chunfeng Yang
Topics & Concepts
Materials scienceGallium nitrideCrystal (programming language)NitrideComposite materialGalliumStress fieldDiamondRadial stressNucleationMetallurgyStructural engineeringDeformation (meteorology)Layer (electronics)Finite element methodChemistryOrganic chemistryEngineeringComputer scienceProgramming languageMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchGaN-based semiconductor devices and materials