Litcius/Paper detail

High temperature oxidation resistance of physical vapor deposited Hf-Si-B2±z thin films

T. Glechner, A. Bahr, Rainer Hahn, Tomasz Wójcik, M. Heller, A. Kirnbauer, J. Ramm, S. Kolozsvári, Peter Felfer, H. Riedl

2022Corrosion Science18 citationsDOIOpen Access PDF

Abstract

Within physical vapor deposited Hf-Si-B2±z thin films, selective diffusion-driven oxidation of Si is identified to cause outstanding oxidation resistance at temperatures up to 1500 °C. After 60 h at 1200 °C, the initially 2.47 µm thin Hf0.20Si0.23B0.57 thin film exhibits a dense oxide scale of only 1.56 µm. The thermally induced decomposition of metastable Hf-Si-B2±z leads not only to the formation of Si precipitates within the remaining thin film (related to a non-homogenous Si distribution after the deposition) but also to pure Si layers on top and bottom of the Hf-Si-B2±z coatings next to the excellent adherend SiO2 based scales.

Topics & Concepts

Thin filmMaterials scienceMetastabilityPhysical vapor depositionChemical vapor depositionOxideCorrosionDeposition (geology)DiffusionSiliconChemical engineeringAnalytical Chemistry (journal)Composite materialMetallurgyNanotechnologyChemistryThermodynamicsBiologyPhysicsSedimentPaleontologyOrganic chemistryChromatographyEngineeringAdvanced ceramic materials synthesisAdvanced materials and compositesSemiconductor materials and devices