Review of sensing and actuation technologies – from optical MEMS and nanophotonics to photonic nanosystems
Yiming Ma, Weixin Liu, Xinmiao Liu, Nan Wang, Hui Zhang
Abstract
10.1080/15599612.2024.2342279
Topics & Concepts
NanophotonicsPhotonicsMicroelectromechanical systemsComputer scienceNanotechnologyOptoelectronicsMaterials sciencePhotonic and Optical DevicesNeural Networks and Reservoir ComputingMechanical and Optical Resonators