Comparison of thermal properties of a hot target magnetron operated in DC and long HIPIMS modes
Andrey V. Kaziev, D. V. Kolodko, Alexander V. Tumarkin, Maksim M. Kharkov, V. Yu. Lisenkov, N.S. Sergeev
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceCavity magnetronThermocouplePulsed DCPulsed powerPlasmaDirect currentPulse durationAnalytical Chemistry (journal)Sputter depositionPower (physics)LaserComposite materialThermodynamicsOpticsThin filmChemistryPhysicsSputteringQuantum mechanicsChromatographyNanotechnologyMetal and Thin Film MechanicsPlasma Diagnostics and ApplicationsGaN-based semiconductor devices and materials